@misc{indiciae405e70b2d405, title = {MEMS Micro-Valve for Space Applications}, author = {Chakraborty, I. and Tang, W. C. and Bame, D. P. and Tang, T. K.}, year = {1998}, url = {https://ntrs.nasa.gov/citations/20000052736}, note = {Source identifier: 20000052736} }