@misc{indiciae88efa950541f, title = {Micromachined, Electrostatically Deformable Reflectors}, author = {Bartman, Randall K. and Wang, Paul K. C. and Miller, Linda M. and Kenny, Thomas W. and Kaiser, William J. and Hadaegh, Fred Y. and Agronin, Michael L.}, year = {1995}, url = {https://ntrs.nasa.gov/citations/19950070324}, note = {Source identifier: 19950070324} }