@misc{indiciaead17f84bf650,
  title = {A sub-cm micromachined electron microscope},
  author = {Feinerman, A. D. and Crewe, D. A. and Perng, D. C. and Shoaf, S. E. and Crewe, A. V.},
  year = {1993},
  url = {https://ntrs.nasa.gov/citations/19940025271},
  note = {Source identifier: 19940025271}
}