@misc{indiciae571d0413561f,
  title = {Micromachined Silicon Waveguides},
  author = {Mcgrath, William R. and Tai, Yu-Chong and Yap, Markus and Walker, Christopher K.},
  year = {1994},
  url = {https://ntrs.nasa.gov/citations/19940000523},
  note = {Source identifier: 19940000523}
}