@misc{indiciae3075370f2bac,
  title = {Etching method for photoresists or polymers},
  author = {Lerner, Narcinda R. and Wydeven, Theodore J., Jr.},
  year = {1991},
  url = {https://ntrs.nasa.gov/citations/19910021944},
  note = {Source identifier: 19910021944}
}