@misc{indiciae340ee85cdebc,
  title = {Decrease in the etch rate of polymers in the oxygen afterglow with increasing gas flow rate},
  author = {Lerner, N. R. and Wydeven, T.},
  year = {1988},
  url = {https://ntrs.nasa.gov/citations/19890026351},
  note = {Source identifier: 19890026351}
}