@misc{indiciae62353a568dd2,
  title = {Plasma/Neutral-Beam Etching Apparatus},
  author = {Langer, William and Cohen, Samuel and Cuthbertson, John and Manos, Dennis and Motley, Robert},
  year = {1989},
  url = {https://ntrs.nasa.gov/citations/19890000261},
  note = {Source identifier: 19890000261}
}