@misc{indiciae4c38d20d8965,
  title = {Fluidized bed silicon deposition},
  author = {Hsu, G. and Morrison, A. and Rohatgi, N. and Lutwack, R. and Macconnell, T.},
  year = {1984},
  url = {https://ntrs.nasa.gov/citations/19850053502},
  note = {Source identifier: 19850053502}
}