@misc{indiciaecad3ab320d88,
  title = {Iron impurities in Si3N4 processing},
  author = {Bouldin, C. E. and Stern, E. A. and Donley, M. S. and Stoebe, T. G.},
  year = {1985},
  url = {https://ntrs.nasa.gov/citations/19850053356},
  note = {Source identifier: 19850053356}
}