@misc{indiciae4f49941c46b6,
  title = {Producing Silicon Carbide for Semiconductor Devices},
  author = {Hsu, G. C. and Rohatgi, N. K.},
  year = {1986},
  url = {https://ntrs.nasa.gov/citations/19850000342},
  note = {Source identifier: 19850000342}
}