@misc{indiciae21dc6e479a40,
  title = {Method for sequentially processing a multi-level interconnect circuit in a vacuum chamber},
  author = {Routh, D. E. and Sharma, G. C.},
  year = {1984},
  url = {https://ntrs.nasa.gov/citations/19840014816},
  note = {Source identifier: 19840014816}
}