@misc{indiciae2994e6a25a63,
  title = {Controlled in situ etch-back},
  author = {Mattauch, R. J. and Seabaugh, A. C.},
  year = {1981},
  url = {https://ntrs.nasa.gov/citations/19830012518},
  note = {Source identifier: 19830012518}
}