@misc{indiciaef7a3f5099a79,
  title = {Method for sequentially processing a multi-level interconnect circuit in a vacuum chamber},
  author = {Routh, D. E. and Sharma, G. C.},
  year = {1982},
  url = {https://ntrs.nasa.gov/citations/19820025758},
  note = {Source identifier: 19820025758}
}