TY  - RPRT
TI  - Progress in MOSFET double-layer metalization
AU  - Gassaway, J. D.
AU  - Trotter, J. D.
AU  - Wade, T. E.
PY  - 1980
UR  - https://ntrs.nasa.gov/citations/19800000280
ID  - 19800000280
ER  -