@misc{indiciaec62b9a50e914,
  title = {Progress in MOSFET double-layer metalization},
  author = {Gassaway, J. D. and Trotter, J. D. and Wade, T. E.},
  year = {1980},
  url = {https://ntrs.nasa.gov/citations/19800000280},
  note = {Source identifier: 19800000280}
}