@misc{indiciae09bd50eadd19,
  title = {Computer simulation of impurity diffusion in silicon, part 1},
  author = {Gassaway, J. D. and Etheridge, J. A.},
  year = {1972},
  url = {https://ntrs.nasa.gov/citations/19720007895},
  note = {Source identifier: 19720007895}
}