@misc{indiciae257510b19e10,
  title = {Pulsed high-voltage dc RF sputtering},
  author = {Przybyszewski, J. S., Jr. and Shaltens, R. K.},
  year = {1969},
  url = {https://ntrs.nasa.gov/citations/19690000619},
  note = {Source identifier: 19690000619}
}