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Wang, Tianyi

Publications and source records attributed to Wang, Tianyi.

Simulation Study of High-Precision Characterization of MeV Electron Interactions for Advanced Nano-Imaging of Thick Biological Samples and Microchips

The resolution of a mega-electron-volt scanning transmission electron microscope (MeV-STEM) is primarily governed by the properties of the incident electron beam and angular broadening effects that occur within thick biological samples and microchips. A precise understanding and mitigation of these constraints require detailed knowledge of beam emittance, aberrations in the STEM column optics, and energy-dependent elastic and inelastic critical angles of the materials being examined. This simulation study proposes a standardized experimental framework for comprehensively assessing beam intensity, divergence, and size at the sample exit. This framework aims to characterize electron-sample interactions, reconcile discrepancies among analytical models, and validate Monte Carlo (MC) simulations for enhanced predictive accuracy. Our numerical findings demonstrate that precise measurements of these parameters, especially angular broadening, are not only feasible but also essential for optimizing imaging resolution in thick biological samples and microchips. By utilizing an electron source with minimal emittance and tailored beam characteristics, along with amorphous ice and silicon samples as biological proxies and microchip materials, this research seeks to optimize electron beam energy by focusing on parameters to improve the resolution in MeV-STEM/TEM. This optimization is particularly crucial for in situ imaging of thick biological samples and for examining microchip defects with nanometer resolutions. Our ultimate goal is to develop a comprehensive mapping of the minimum electron energy required to achieve a nanoscale resolution, taking into account variations in sample thickness, composition, and imaging mode.

36 MATERIALS SCIENCE↗

A comprehensive review of dwell time optimization methods in computer-controlled optical surfacing

Dwell time plays a vital role in determining the accuracy and convergence of the computer-controlled optical surfacing process. However, optimizing dwell time presents a challenge due to its ill-posed nature, resulting in non-unique solutions. To address this issue, several well-known methods have emerged, including the iterative, Bayesian, Fourier transform, and matrix-form methods. Despite their independent development, these methods share common objectives, such as minimizing residual errors, ensuring dwell time's positivity and smoothness, minimizing total processing time, and enabling flexible dwell positions. This paper aims to comprehensively review the existing dwell time optimization methods, explore their interrelationships, provide insights for their effective implementations, evaluate their performances, and ultimately propose a unified dwell time optimization methodology.

36 MATERIALS SCIENCE↗

Two-step retrace error calibration removing tilt ambiguity in coherence scanning interferometry

In interferometry measurement, the retrace error often limits its high-precision metrology applications. Retrace error calibration with tilted flats can give a relation between the retrace error and the introduced tilt angles, but there is still an ambiguity between the introduced tilt angles and the tilt terms in the created retrace error. Here, we propose a novel, to the best of our knowledge, two-step calibration method to resolve this tilt ambiguity. It involves additional measurements of spherical mirror(s) with known curvature(s). The experiment shows that the curvature deviation due to the tilt ambiguity can be significantly reduced after applying the proposed method.

36 MATERIALS SCIENCE↗

Collimated phase measuring deflectometry

Phase measuring deflectometry has been applied for free-form specular surface metrology, but its measured slope results are sensitive to the depth of sample positioning, which is also called the height-slope ambiguity. The objective of this work is to tackle this height-slope ambiguity problem. The main idea is to introduce collimated camera rays using a telecentric imaging lens and collimated structured-light illumination with a Fourier lens. This setup makes the fringe phases become only sensitive to the surface slopes and insensitive to the depth of the sample positioning. In this way, the slope calculation is theoretically independent of the sample depth. We call this new deflectometry technique Collimated Phase Measuring Deflectometry (CPMD). With our developed CPMD experimental setup, the measurement is insensitive to the depth of sample positioning, e.g., the measured height dispersion is less than 30 nm RMS within a 10 mm depth range when measuring a 50-mm-diameter spherical mirror with a 200 mm radius of curvature. In conclusion, the merits and limitations of the proposed CPMD technique are discussed, revealing its prospects in practical metrology applications and potential future investigations.

36 MATERIALS SCIENCE↗

Energy gap of topological surface states in proximity to a magnetic insulator

Abstract Topological surface-states can acquire an energy gap when time-reversal symmetry is broken by interfacing with a magnetic insulator. This gap has yet to be measured. Such topological-magnetic insulator heterostructures can host a quantized anomalous Hall effect and can allow the control of the magnetic state of the insulator in a spintronic device. In this work, we observe the energy gap of topological surface-states in proximity to a magnetic insulator using magnetooptical Landau level spectroscopy. We measure Pb 1-x Sn x Se–EuSe heterostructures grown by molecular beam epitaxy exhibiting a record mobility and low Fermi energy. Through temperature dependent measurements and theoretical calculations, we show this gap is likely due to quantum confinement and conclude that the magnetic proximity effect is weak in this system. This weakness is disadvantageous for the realization of the quantum anomalous Hall effect, but favorable for spintronic devices which require the preservation of spin-momentum locking at the Fermi level.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Statistical Tool Size Study for Computer-Controlled Optical Surfacing

Over the past few decades, computer-controlled optical surfacing (CCOS) systems have become more deterministic. A target surface profile can be predictably achieved with a combination of tools of different sizes. However, deciding the optimal set of tool sizes that will achieve the target residual error in the shortest run time is difficult, and no general guidance has been proposed in the literature. In this paper, we present a computer-assisted study on choosing the proper tool size for a given surface error map. First, we propose that the characteristic frequency ratio (CFR) can be used as a general measure of the correction capability of a tool over a surface map. Second, the performance of different CFRs is quantitatively studied with a computer simulation by applying them to guide the tool size selection for polishing a large number of randomly generated surface maps with similar initial spatial frequencies and root mean square errors. Finally, we find that CFR = 0.75 achieves the most stable trade-off between the total run time and the number of iterations and thus can be used as a general criterion in tool size selection for CCOS processes. To the best of our knowledge, the CFR is the first criterion that ties tool size selection to overall efficiency.

36 MATERIALS SCIENCE↗

Computer-controlled finishing via dynamically constraint position-velocity-time scheduler

In a Computer Numerical Controlled (CNC) finishing process, the target material removal from an optical surface is guided by the convolution between the influence function of a machine tool and its dwell time at certain points over the surface. To reduce dynamics stressing and increase machining efficiency, the dwell time must be converted to varying velocities, which are the actual inputs to the machine tool controller. Conventionally, the conversion assumed constant acceleration and relied on linear motion interpolation, which caused discontinuities in velocities. This unsmooth motion affects the material removal distribution, and, thus, the accuracy of the finished surface shape. Many modern CNC machines support the smoother, cubic-polynomial interpolated Position-Velocity-Time (PVT) motion mode; however, the conventional scheduler may fail to provide suitable velocities for the PVT. Here in this study answers this challenge by proposing a novel PVT-based velocity scheduler that achieves smooth motion while considering CNC dynamic limits. Firstly, the principle of the PVT is explained, and the PVT-based velocity scheduler is formulated. Secondly, a quadratic programming is used to optimize the velocities by imposing the CNC dynamic constraints and the C 1 continuities (zeroth and first derivatives are continuous) simultaneously. Thirdly, the smoothness and accuracy of the scheduled velocities are studied on different kinds of tool paths via simulation. Finally, a sub-0.3 nm level surface finishing experiment using ion beam figuring is demonstrated to verify the feasibility of the proposed method. The PVT-based scheduler and simulator code is open-sourced.

36 MATERIALS SCIENCE↗

Multi-pitch nano-accuracy surface profiler for strongly curved X-ray mirror metrology

We present our recent research and development effort on the Multi-Pitch Nano-accuracy Surface Profiler (MPNSP). This metrology instrument is developed to characterize strongly curved X-ray mirrors proposed to achieve diffraction-limited soft X-ray focusing for scientific applications at the synchrotron beamlines. The measurement process consists of forward-and-backward scans on the test mirror surface along its tangential direction at multiple pitch angles. Our research and development in this work aim to take the challenge of measuring strongly curved X-ray mirrors with a typical total slope range ≳10 mrad, while maintaining the Root Mean Square (RMS) value of measurement repeatability and self-consistency at 50 nrad RMS level. We first introduce the mechanical design, followed by a brief review of the mathematical model and the optimization algorithm for the MPNSP technique. By detecting the rotation axis of the mirror pitch with a machine vision approach, we can determine and then reduce the vertical distance between the pitch rotation axis and the test mirror surface to a sub-mm level. In addition, we describe a practical data acquisition procedure for strongly curved X-ray mirrors with a total slope range larger than the slope measuring range of the autocollimator used in the instrument. As a result, the proposed MPNSP measurements with different mirror orientations achieve remarkable self-consistency and reproducibility of < 50 nrad RMS in slope and < 0.5 nm RMS in height.

42 ENGINEERING↗