Design, fabrication, assembly and delivery of a laboratory prototype of a residual gas analyzer
The design, development, and testing of a wide mass range residual gas analyzer which will be one component of an integrated real time contamination monitor system are described. The instrument has been developed and tested to the laboratory prototype phase, demonstrating the performance that can be expected from a flight instrument of similar design. The instrument's analyzer is of the quadrupole type and a cold cathode ion source is employed as the ionizer. The associated electronics supply all necessary operating and mass sweep voltages for the ionizer, analyzer and electron multiplier ion detector. The instrument features a very fast linear electrometer with automatic range changing. The full mass range of 2 to 300 amu is automatically and repetitively scanned every sixty seconds and suitable telemetry outputs are provided for intensity and mass identification as well as a digital identification of the electrometer range.