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Shealy, David L.

Publications and source records attributed to Shealy, David L..

16 records
All sourcesNASA NTRSDOE OSTI
NASA NTRS1994

Optical Analysis of an Ultra-High resolution Two-Mirror Soft X-Ray Microscope

This work has summarized for a Schwarzschild microscope some relationships between numerical aperture (NA), magnification, diameter of the primary mirror, radius of curvature of the secondary mirror, and the total length of the microscope. To achieve resolutions better than a spherical Schwarzschild microscope of 3.3 Lambda for a perfectly aligned and fabricated system. it is necessary to use aspherical surfaces to control higher-order aberrations. For an NA of 0.35, the aspherical Head microscope provides diffraction limited resolution of 1.4 Lambda where the aspherical surfaces differ from the best fit spherical surface by approximately 1 micrometer. However, the angle of incidence varies significantly over the primary and the secondary mirrors, which will require graded multilayer coatings to operate near peak reflectivities. For higher numerical apertures, the variation of the angle of incidence over the secondary mirror surface becomes a serious problem which must be solved before multilayer coatings can be used for this application. Tolerance analysis of the spherical Schwarzschild microscope has shown that water window operations will require 2-3 times tighter tolerances to achieve a similar performance for operations with 130 A radiation. Surface contour errors have been shown to have a significant impact on the MTF and must be controlled to a peak-to-valley variation of 50-100 A and a frequency of 8 periods over the surface of a mirror.

Shealy, David L.↗
NASA NTRS1993

Ultra-high resolution water window x ray microscope optics design and analysis

This project has been focused on the design and analysis of an ultra-high resolution water window soft-x-ray microscope. These activities have been accomplished by completing two tasks contained in the statement of work of this contract. The new results from this work confirm: (1) that in order to achieve resolutions greater than three times the wavelength of the incident radiation, it will be necessary to use spherical mirror surfaces and to use graded multilayer coatings on the secondary in order to accommodate the large variations of the angle of incidence over the secondary when operating the microscope at numerical apertures of 0.35 or greater; (2) that surface contour errors will have a significant effect on the optical performance of the microscope and must be controlled to a peak-to-valley variation of 50-100 A and a frequency of 8 periods over the surface of a mirror; and (3) that tolerance analysis of the spherical Schwarzschild microscope has been shown that the water window operations will require 2-3 times tighter tolerances to achieve a similar performance of operations with 130 A radiation. These results have been included in a manuscript included in the appendix.

Shealy, David L.↗
NASA NTRS1993

Imaging Schwarzschild multilayer X-ray microscope

We have designed, analyzed, fabricated, and tested Schwarzschild multilayer X-ray microscopes. These instruments use flow-polished Zerodur mirror substrates which have been coated with multilayers optimized for maximum reflectivity at normal incidence at 135 A. They are being developed as prototypes for the Water Window Imaging X-Ray Microscope. Ultrasmooth mirror sets of hemlite grade sapphire have been fabricated and they are now being coated with multilayers to reflect soft X-rays at 38 A, within the biologically important 'water window'. In this paper, we discuss the fabrication of the microscope optics and structural components as well as the mounting of the optics and assembly of the microscopes. We also describe the optical alignment, interferometric and visible light testing of the microscopes, present interferometrically measured performance data, and provide the first results of optical imaging tests.

Hoover, Richard B.↗
NASA NTRS1992

Design and analysis of soft X-ray imaging microscopes

The spherical Schwarzschild microscope for soft X-ray applications in microscopy and projection lithography consists of two concentric spherical mirrors configured such that the third-order spherical aberration and coma are zero. Since multilayers are used on the mirror substrates for X-ray applications, it is desirable to have only two reflecting surfaces in a microscope. To reduce microscope aberrations and increase the field of view, generalized mirror surface profiles are here considered. Based on incoherent and sine wave modulation transfer function calculations, the object plane resolution of a microscope has been analyzed as a function of the object height and numerical aperture (NA) of the primary for several spherical Schwarzschild, conic, and aspherical Head reflecting two-mirror microscope configurations. The Head microscope with a NA of 0.4 achieves diffraction limited performance for objects with a diameter of 40 microns. Thus, it seems possible to record images with a feature size less than 100 A with a 40x microscope when using 40 A radiation.

Shealy, David L.↗
NASA NTRS1991

X ray microscope assembly and alignment support and advanced x ray microscope design and analysis

Considerable efforts have been devoted recently to the design, analysis, fabrication, and testing of spherical Schwarzschild microscopes for soft x ray application in microscopy and projection lithography. The spherical Schwarzschild microscope consists of two concentric spherical mirrors configured such that the third order spherical aberration and coma are zero. Since multilayers are used on the mirror substrates for x ray applications, it is desirable to have only two reflecting surfaces in a microscope. In order to reduce microscope aberrations and increase the field of view, generalized mirror surface profiles have been considered in this investigation. Based on incoherent and sine wave modulation transfer function (MTF) calculations, the object plane resolution of a microscope has been analyzed as a function of the object height and numerical aperture (NA) of the primary for several spherical Schwarzschild, conic, and aspherical head reflecting two mirror microscope configurations.

Shealy, David L.↗
NASA NTRS1991

Design and analysis of aspherical multilayer imaging X-ray microscope

Spherical Schwarzschild microscopes for soft X-ray applications in microscopy and projection lithography employ two concentric spherical mirrors that are configured such that the third-order spherical aberration and coma are zero. Based on incoherent, sine-wave MTF calculations, the object-plane resolution of a magnification-factor-20 microscope is presently analyzed as a function of object height and numerical aperture of the primary for several spherical Schwarzschild, conic, and aspherical two-mirror microscope configurations.

Shealy, David L.↗
NASA NTRS1991

X ray imaging microscope for cancer research

The NASA technology employed during the Stanford MSFC LLNL Rocket X Ray Spectroheliograph flight established that doubly reflecting, normal incidence multilayer optics can be designed, fabricated, and used for high resolution x ray imaging of the Sun. Technology developed as part of the MSFC X Ray Microscope program, showed that high quality, high resolution multilayer x ray imaging microscopes are feasible. Using technology developed at Stanford University and at the DOE Lawrence Livermore National Laboratory (LLNL), Troy W. Barbee, Jr. has fabricated multilayer coatings with near theoretical reflectivities and perfect bandpass matching for a new rocket borne solar observatory, the Multi-Spectral Solar Telescope Array (MSSTA). Advanced Flow Polishing has provided multilayer mirror substrates with sub-angstrom (rms) smoothnesss for the astronomical x ray telescopes and x ray microscopes. The combination of these important technological advancements has paved the way for the development of a Water Window Imaging X Ray Microscope for cancer research.

Hoover, Richard B.↗
NASA NTRS1990

Design and analysis of a Schwarzschild imaging multilayer X-ray microscope

Several Schwarzschild X-ray microscope optics were designed. Diffraction analysis indicates that better than 600 A spatial resolution in the object plane up to a 0.7 mm field of view can be achieved with 100 A radiation. Currently, a 20 x normal incidence multilayer X-ray microscope of 1.35 m overall length is being fabricated. Other microscope systems for use in conjunction with X-ray telescopes were also analyzed and designed. This paper reports on the results of these studies and the X-ray microscope fabrication effort.

Shealy, David L.↗
NASA NTRS1990

Formula for the rms blur circle radius of Wolter telescope based on aberration theory

A formula for the rms blur circle for Wolter telescopes has been derived using the transverse ray aberration expressions of Saha (1985), Saha (1984), and Saha (1986). The resulting formula for the rms blur circle radius over an image plane and a formula for the surface of best focus based on third-, fifth-, and seventh-order aberration theory predict results in good agreement with exact ray tracing. It has also been shown that one of the two terms in the empirical formula of VanSpeybroeck and Chase (1972), for the rms blur circle radius of a Wolter I telescope can be justified by the aberration theory results. Numerical results are given comparing the rms blur radius and the surface of best focus vs the half-field angle computed by skew ray tracing and from analytical formulas for grazing incidence Wolter I-II telescopes and a normal incidence Cassegrain telescope.

Shealy, David L.↗
NASA NTRS1990

Design and analysis of multilayer x ray/XUV microscope

The design and analysis of a large number of normal incidence multilayer x ray microscopes based on the spherical mirror Schwarzschild configuration is examined. Design equations for the spherical mirror Schwarzschild microscopes are summarized and used to evaluate mirror parameters for microscopes with magnifications ranging from 2 to 50x. Ray tracing and diffraction analyses are carried out for many microscope configurations to determine image resolution as a function of system parameters. The results are summarized in three publication included herein. A preliminary study of advanced reflecting microscope configurations, where aspherics are used in place of the spherical microscope mirror elements, has indicated that the aspherical elements will improve off-axis image resolution and increase the effective field of view.

Shealy, David L.↗
NASA NTRS1989

Design of a normal incidence multilayer imaging X-ray microscope

Normal incidence multilayer Cassegrain X-ray telescopes were flown on the Stanford/MSFC Rocket X-ray Spectroheliograph. These instruments produced high spatial resolution images of the sun and conclusively demonstrated that doubly reflecting multilayer X-ray optical systems are feasible. The images indicated that aplanatic imaging soft X-ray/EUV microscopes should be achievable using multilayer optics technology. A doubly reflecting normal incidence multilayer imaging X-ray microscope based on the Schwarzschild configuration has been designed. The design of the microscope and the results of the optical system ray trace analysis are discussed. High resolution aplanatic imaging X-ray microscopes using normal incidence multilayer X-ray mirrors should have many important applications in advanced X-ray astronomical instrumentation, X-ray lithography, biological, biomedical, metallurgical, and laser fusion research.

Shealy, David L.↗
NASA NTRS1989

Development of a normal incidence multilayer, imaging X-ray microscope

This paper describes the design, analysis, and fabrication of a normal-incidence multilayer 20x Schwarzschild imaging X-ray microscope. The microscope is being fabricated using much of the technology implemented in the Multispectral Solar Telescope Array. Results of diffraction analysis show that better than 400 A spatial resolution in the object plane up to a 1-mm field of view can be achieved with 125 A radiation. Other microscope systems for use in conjunction with X-ray telescopes are analyzed and designed.

Shealy, David L.↗
NASA NTRS1988

Design of an imaging microscope for soft X-ray applications

An imaging soft X-ray microscope with a spatial resolution of 0.1 micron and normal incidence multilayer optics is discussed. The microscope has a Schwarzschild configuration, which consists of two concentric spherical mirrors with radii of curvature which minimize third-order spherical aberration, coma, and astigmatism. The performance of the Stanford/MSFC Cassegrain X-ray telescope and its relevance to the present microscope are addressed. A ray tracing analysis of the optical system indicates that diffraction-limited performance can be expected for an object height of 0.2 mm.

Hoover, Richard B.↗
NASA NTRS1986

Hybrid X-ray telescope systems

It has been known for some time that glancing incidence X-ray optics have sharply peaked point response functions. The spatial resolution of Wolter X-ray telescope systems is frequently limited by the performance characteristics of the X-ray detector rather than by the optics, even when high resolution detectors such as photographic emulsions are used. This problem becomes even more severe when it is desirable to take advantage of the high sensitivity and broad wavelength response afforded by modern solid state detectors such as charge coupled devices or multi-anode microchannel arrays. Results of theoretical investigations of methods for increasing the telescope plate scale by the use of glancing incidence hyperboloid/ellipsoid X-ray microscope optics and normal incidence contoured layered synthetic microstructure optics for coupling the Wolter mirrors to the detector are reported. The relative merits of the different hybrid X-ray telescope systems which result will be discussed. Considerations will be made concerning applications of these systems to high resolution imagery and spectroscopy of astronomical X-ray/XUV sources.

Shealy, David L.↗
NASA NTRS1986

Multilayer X-ray imaging systems

An assessment of the imaging properties of multilayer X-ray imaging systems with spherical surfaces has been made. A ray trace analysis was performed to investigate the effects of using spherical substrates (rather than the conventional paraboloidal/hyperboloidal contours) for doubly reflecting Cassegrain telescopes. These investigations were carried out for mirrors designed to operate at selected soft X-ray/XUV wavelengths that are of significance for studies of the solar corona/transition region from the Stanford/MSFC Rocket X-Ray Telescope. The effects of changes in separation of the primary and secondary elements were also investigated. These theoretical results are presented as well as the results of ray trace studies to establish the resolution and vignetting effects as a function of field angle and system parameters.

Shealy, David L.↗