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Remillard, Stephen Keith

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Generating and Sustaining Microplasma with Microwaves (Final Report)

Plasma can be generated in spaces ranging in size from astronomical down to the microscopic. The physics that describes the gas breakdown is different at each size scale. The dominant physical phenomenon also depends on the type of electromagnetic field that drives the breakdown – static, AC, RF, microwave, visible. This project, staffed by undergraduate researchers and their mentor, focused on plasma generated in the size range of 10 to 500 micrometers using microwave energy. This project was motivated by the prior observation that plasma can only be generated in microgaps when the gas is above a certain gap-dependent pressure, here called the transition pressure. A microwave-driven microgap was designed and constructed in this project and then used to measure the electric field required to initiate plasma over a wide range of pressures from 0.1 Torr to 760 Torr (1 atmosphere).

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗