Transition Edge YBa_2Cu_3O_(7-x) Microbolometers for Infrared Staring Arrays
A potentially important application of high-temperature superconducting microbolometers is infrared staring arrays. In many such staring arrays, sensitivity is more important than speed of response. Thus, it is desirable to design low-thermal-mass pixels that are thermally isolated from the substrate. To this end, Johnson, et al. at Honeywell have fabricated meander lines of YBa_2Cu_3O_7(-x) (YBCO) sandwiched between layers of Si_3N_4 (SN). The silicon was etched out from under each YBCO meander line to form low-thermal-mass, thermally isolated microbolometers. These devices showed responsivities up to 60 kV/W with a 16 micro-A bias, and a noise equivalent power of 9x10^(-13) W/Hz^(1/2) at 7 Hz with a 5 micro-A bias (neglecting contact noise)...