Flextensional Single Crystal Piezoelectric Actuators for Membrane Deformable Mirrors
Large aperture and light weight space telescopes requires adaptive optics with deformable mirrors capable of large amplitude aberration corrections at a broad temperature range for space applications including NASA missions such as SAFIR, TPF, Con-X, etc. The single crystal piezoelectric actuators produced at TRS offer large stroke, low hysteresis, and an excellent cryogenic strain response. Specifically, the recently developed low profile, low voltage flextensional single crystal piezoelectric actuators with dimensions of 18 x 5 x 1 mm showed stroke larger than 95 microns under 300 V. Furthermore, flextensional actuator retained approx. 40-50% of its room temperature strain at liquid Nitrogen environment. In this paper, ATILA FEM design of flextensional actuators, actuator fabrication, and characterization results will be presented for the future work on membrane deformable mirror.