Engineering topics
Publications and source records attributed to Iya, Sridhar K..
Fluidized-bed pyrolysis reactor produces high-purity polycrystalline silicon from silane or halosilane via efficient heterogeneous deposition of silicon on silicon seed particles. Formation of silicon dust via homogeneous decomposition of silane minimized, and deposition of silicon on wall of reactor effectively eliminated. Silicon used to construct solar cells and other semiconductor products.
Improved reactor serves as last stage in system processing metallurgical-grade silicon feedstock into silicon powder of ultrahigh purity. Silane pyrolized to silicon powder and hydrogen gas via homogeneous decomposition reaction in free space. Features set of individually adjustable electrical heaters and purge flow of hydrogen to improve control of pyrolysis conditions. Power supplied to each heater set in conjunction with flow in reactor to obtain desired distribution of temperature as function of position along reactor.
Deposition of silicon on wall suppressed. In new fluidized bed, silicon seed particles heated in uppermost zone of reactor. Hot particles gradually mix with lower particles and descend through fluidized bed. Lower wall of vessel kept relatively cool. Because silane enters at bottom and circulates through reactor pyrolized to silicon at high temperatures, silicon deposited on particles in preference wall. Design of fluidized bed for production of silicon greatly reduces tendency of silicon to deposit on wall of reaction vessel.
An improved heated fluidized bed reactor and method for the production of high purity polycrystalline silicon by silane pyrolysis wherein silicon seed particles are heated in an upper heating zone of the reactor and admixed with particles in a lower zone, in which zone a silane-containing gas stream, having passed through a lower cooled gas distribution zone not conducive to silane pyrolysis, contacts the heated seed particles whereon the silane is heterogeneously reduced to silicon.
An improved heated fluidized bed reactor and method for the production of high purity polycrystalline silicon by silane pyrolysis wherein silicon seed particles are heated in an upper heating zone of the reactor and admixed with particles in a lower reaction zone, in which zone a silane-containing gas stream, having passed through a lower cooled gas distribution zone not conducive to silane pyrolysis, contacts the heated seed particles whereon the silane is heterogeneously reduced to silicon.
Method is provided for generating fine sized seed particles of silicon for use in the fluidized bed pyrolysis of silane.
Consolidation of very fine silicon powder into shotted form using heated crucible.