Key aspects of sub-nanometer deterministic ion beam figuring for synchrotron hard x-ray mirror fabrication
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36 MATERIALS SCIENCE↗
Engineering topics
Idir, Mourad
Publications and source records attributed to Idir, Mourad.
Post-production correction of lamellar x-ray gratings by ion beam figuring
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36 MATERIALS SCIENCE↗
A comprehensive review of dwell time optimization methods in computer-controlled optical surfacing
Dwell time plays a vital role in determining the accuracy and convergence of the computer-controlled optical surfacing process. However, optimizing dwell time presents a challenge due to its ill-posed nature, resulting in non-unique solutions. To address this issue, several well-known methods have emerged, including the iterative, Bayesian, Fourier transform, and matrix-form methods. Despite their independent development, these methods share common objectives, such as minimizing residual errors, ensuring dwell time's positivity and smoothness, minimizing total processing time, and enabling flexible dwell positions. This paper aims to comprehensively review the existing dwell time optimization methods, explore their interrelationships, provide insights for their effective implementations, evaluate their performances, and ultimately propose a unified dwell time optimization methodology.
36 MATERIALS SCIENCE↗
Manufacturability-based optical design optimization for advanced Kirkpatrick–Baez X-ray focusing mirrors
The advanced Kirkpatrick–Baez (AKB) mirror setup is an effective and compelling solution to provide stable X-ray nano-focusing for synchrotron radiation or free-electron laser beamlines. We propose an AKB mirror design optimization approach to mitigate the difficulties associated with mirror fabrication by minimizing the total slope ranges of the four curved mirrors while achieving the expected focusing performance. In the optimization, we have considered geometry constraints to ensure the beam acceptance with the required clear aperture, the diffraction-limited focal size with the adequate numerical aperture, and the desired mirror gaps for adjustment and the necessary working distance for the sample stage. Additionally, practical constraints linked to mirror metrology and fabrication, such as mirror length limits and curvature uncertainty in measurement, are taken into account. Furthermore, progressive objective optimization eliminates the need for any initial guess, fully automating the AKB optimization process. This approach facilitates the development of an elegant Wolter-I or Wolter-III type AKB design solution that satisfies these multiple constraints. In cases where constraints cannot be simultaneously satisfied, the optimization results provide valuable insights into areas where trade-offs need to be considered. Simulations with ray tracing and wavefront propagation validate the optimized AKB design showing high tolerance to the beam incident angle.
36 MATERIALS SCIENCE↗
E-PVT: enhanced position-velocity-time scheduler for computer-controlled optical finishing with comprehensive considerations of dynamics constraints, continuity and efficiency
Deterministic computer-controlled optical finishing is an essential approach for achieving high-quality optical surfaces. Its determinism and convergence rely heavily on precise and smooth motion control to guide the machine tool over an optical surface to correct residual errors. One widely supported and smooth motion control model is position-velocity-time (PVT), which employs piecewise cubic polynomials to describe positions. Our prior research introduced a PVT-based velocity scheduling method, demonstrating sub-nanometer level convergence in ion beam figuring (IBF) processes. However, three challenges remained. Firstly, this method relies on quadratic programming, resulting in computational intensiveness for dense tool paths. Secondly, the dynamics constraints and velocity and acceleration continuities are not comprehensively considered, limiting the full potential of PVT-based control. Thirdly, no compensation mechanism existed when dynamics constraints are exceeded. In this study, in response to these challenges, we proposed the Enhanced PVT (E-PVT) method, reducing the time complexity from O ( n 3 ) to O ( n ) while fully addressing dynamics constraints and continuities. A novel compensation method utilizing particle swarm optimization was proposed to address situations where dynamics constraints might be exceeded while maintaining the overall processing efficiency. Validation through simulation and experimentation confirmed the improved performance of E-PVT.
36 MATERIALS SCIENCE↗
Two-step retrace error calibration removing tilt ambiguity in coherence scanning interferometry
In interferometry measurement, the retrace error often limits its high-precision metrology applications. Retrace error calibration with tilted flats can give a relation between the retrace error and the introduced tilt angles, but there is still an ambiguity between the introduced tilt angles and the tilt terms in the created retrace error. Here, we propose a novel, to the best of our knowledge, two-step calibration method to resolve this tilt ambiguity. It involves additional measurements of spherical mirror(s) with known curvature(s). The experiment shows that the curvature deviation due to the tilt ambiguity can be significantly reduced after applying the proposed method.
36 MATERIALS SCIENCE↗
Collimated phase measuring deflectometry
Phase measuring deflectometry has been applied for free-form specular surface metrology, but its measured slope results are sensitive to the depth of sample positioning, which is also called the height-slope ambiguity. The objective of this work is to tackle this height-slope ambiguity problem. The main idea is to introduce collimated camera rays using a telecentric imaging lens and collimated structured-light illumination with a Fourier lens. This setup makes the fringe phases become only sensitive to the surface slopes and insensitive to the depth of the sample positioning. In this way, the slope calculation is theoretically independent of the sample depth. We call this new deflectometry technique Collimated Phase Measuring Deflectometry (CPMD). With our developed CPMD experimental setup, the measurement is insensitive to the depth of sample positioning, e.g., the measured height dispersion is less than 30 nm RMS within a 10 mm depth range when measuring a 50-mm-diameter spherical mirror with a 200 mm radius of curvature. In conclusion, the merits and limitations of the proposed CPMD technique are discussed, revealing its prospects in practical metrology applications and potential future investigations.
36 MATERIALS SCIENCE↗
Ion Beam Figuring System for Synchrotron X-Ray Mirrors Achieving Sub-0.2-µrad and Sub-0.5-nm Root Mean Square
Abstract Optics with high-precision height and slope are increasingly desired in numerous industrial fields. For instance, Kirkpatrick–Baez (KB) mirrors play an important role in synchrotron X-ray applications. A KB system is composed of two aspherical, grazing-incidence mirrors used to focus an X-ray beam. The fabrication of KB mirrors is challenging due to the aspherical departure of the mirror surfaces from base geometries and the high-quality requirements for slope and height residuals. In this paper, we present the process of manufacturing an elliptical cylinder KB mirror using our in-house-developed ion beam figuring (IBF) and metrology technologies. First, the key aspects of figuring and finishing processes with IBF are illustrated in detail. The effect of positioning error on the convergence of the residual slope error is highlighted and compensated. Finally, inspection and cross-validation using different metrology instruments are performed and used as the final validation of the mirror. Results confirm that relative to the requested off-axis ellipse, the mirror has achieved 0.15-µrad root mean square (RMS) and 0.36-nm RMS residual slope and height errors, respectively, while maintaining the initial 0.3-nm RMS microroughness.
36 MATERIALS SCIENCE↗
Effect of electronic transitions on near edge optical properties of off-stoichiometric boron carbide thin films
In the present study, soft x-ray optical properties of off-stoichiometric boron carbide thin films are investigated, and the structure and chemical composition of the film is analyzed using angle dependent x-ray reflectivity and x-ray photoelectron spectroscopy techniques. Energy dependent soft x-ray reflectivity measured at a fixed grazing angle of 1.5° is used to determine the optical constants in the boron K edge region by applying the Kramers–Kronig technique. The measured optical constants show near edge fine features corresponding to σ* and π* resonances. Furthermore, the electronic transitions corresponding to σ* resonance cause a 40%–75% increase in the delta value in the above boron K edge region. The π* transitions corresponding to off-stoichiometric nature of the boron carbide are observed in the absorption spectra near ~ 192.7 eV. Details of the measured soft x-ray optical properties of the off-stoichiometric boron carbide thin film are discussed.
36 MATERIALS SCIENCE↗
Statistical Tool Size Study for Computer-Controlled Optical Surfacing
Over the past few decades, computer-controlled optical surfacing (CCOS) systems have become more deterministic. A target surface profile can be predictably achieved with a combination of tools of different sizes. However, deciding the optimal set of tool sizes that will achieve the target residual error in the shortest run time is difficult, and no general guidance has been proposed in the literature. In this paper, we present a computer-assisted study on choosing the proper tool size for a given surface error map. First, we propose that the characteristic frequency ratio (CFR) can be used as a general measure of the correction capability of a tool over a surface map. Second, the performance of different CFRs is quantitatively studied with a computer simulation by applying them to guide the tool size selection for polishing a large number of randomly generated surface maps with similar initial spatial frequencies and root mean square errors. Finally, we find that CFR = 0.75 achieves the most stable trade-off between the total run time and the number of iterations and thus can be used as a general criterion in tool size selection for CCOS processes. To the best of our knowledge, the CFR is the first criterion that ties tool size selection to overall efficiency.
36 MATERIALS SCIENCE↗
Computer-controlled finishing via dynamically constraint position-velocity-time scheduler
In a Computer Numerical Controlled (CNC) finishing process, the target material removal from an optical surface is guided by the convolution between the influence function of a machine tool and its dwell time at certain points over the surface. To reduce dynamics stressing and increase machining efficiency, the dwell time must be converted to varying velocities, which are the actual inputs to the machine tool controller. Conventionally, the conversion assumed constant acceleration and relied on linear motion interpolation, which caused discontinuities in velocities. This unsmooth motion affects the material removal distribution, and, thus, the accuracy of the finished surface shape. Many modern CNC machines support the smoother, cubic-polynomial interpolated Position-Velocity-Time (PVT) motion mode; however, the conventional scheduler may fail to provide suitable velocities for the PVT. Here in this study answers this challenge by proposing a novel PVT-based velocity scheduler that achieves smooth motion while considering CNC dynamic limits. Firstly, the principle of the PVT is explained, and the PVT-based velocity scheduler is formulated. Secondly, a quadratic programming is used to optimize the velocities by imposing the CNC dynamic constraints and the C 1 continuities (zeroth and first derivatives are continuous) simultaneously. Thirdly, the smoothness and accuracy of the scheduled velocities are studied on different kinds of tool paths via simulation. Finally, a sub-0.3 nm level surface finishing experiment using ion beam figuring is demonstrated to verify the feasibility of the proposed method. The PVT-based scheduler and simulator code is open-sourced.
36 MATERIALS SCIENCE↗
Hybrid height and slope figuring method for grazing-incidence reflective optics
Grazing-incidence reflective optics are commonly used in synchrotron radiation and free-electron laser facilities to transport and focus the emitted X-ray beams. To preserve the imaging capability at the diffraction limit, the fabrication of these optics requires precise control of both the residual height and slope errors. However, all the surface figuring methods are height based, lacking the explicit control of surface slopes. Although our preliminary work demonstrated a one-dimensional (1D) slope-based figuring model, its 2D extension is not straightforward. In this study, a novel 2D slope-based figuring method is proposed, which employs an alternating objective optimization on the slopes in the x - and y -directions directly. An analytical simulation revealed that the slope-based method achieved smaller residual slope errors than the height-based method, while the height-based method achieved smaller residual height errors than the slope-based method. Therefore, a hybrid height and slope figuring method was proposed to further enable explicit control of both the height and slopes according to the final mirror specifications. An experiment to finish an elliptical-cylindrical mirror using the hybrid method with ion beam figuring was then performed. Both the residual height and slope errors converged below the specified threshold values, which verified the feasibility and effectiveness of the proposed ideas.
36 MATERIALS SCIENCE↗
Multi-pitch nano-accuracy surface profiler for strongly curved X-ray mirror metrology
We present our recent research and development effort on the Multi-Pitch Nano-accuracy Surface Profiler (MPNSP). This metrology instrument is developed to characterize strongly curved X-ray mirrors proposed to achieve diffraction-limited soft X-ray focusing for scientific applications at the synchrotron beamlines. The measurement process consists of forward-and-backward scans on the test mirror surface along its tangential direction at multiple pitch angles. Our research and development in this work aim to take the challenge of measuring strongly curved X-ray mirrors with a typical total slope range ≳10 mrad, while maintaining the Root Mean Square (RMS) value of measurement repeatability and self-consistency at 50 nrad RMS level. We first introduce the mechanical design, followed by a brief review of the mathematical model and the optimization algorithm for the MPNSP technique. By detecting the rotation axis of the mirror pitch with a machine vision approach, we can determine and then reduce the vertical distance between the pitch rotation axis and the test mirror surface to a sub-mm level. In addition, we describe a practical data acquisition procedure for strongly curved X-ray mirrors with a total slope range larger than the slope measuring range of the autocollimator used in the instrument. As a result, the proposed MPNSP measurements with different mirror orientations achieve remarkable self-consistency and reproducibility of < 50 nrad RMS in slope and < 0.5 nm RMS in height.
42 ENGINEERING↗