Processes and process development in Taiwan
Silicon material research in the Republic of China (ROC) parallels its development in the electronic industry. A brief outline of the historical development in ROC silicon material research is given. Emphasis is placed on the recent Silane Project managed by the National Science Council, ROC, including project objectives, task forces, and recent accomplishments. An introduction is also given to industrialization of the key technologies developed in this project.
Hwang, H. L.↗