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Her, Jae-Hyuk

Publications and source records attributed to Her, Jae-Hyuk.

Characterizing the composition, structure, and mechanical properties of magnetron sputtering physical vapor deposition TiN and TiSiN coatings

Ti(Si)N coatings were deposited on Si wafers via magnetron sputtering physical vapor deposition technique. Scanning electron microscopy and atomic force microscopy were used to study the morphologies, grain size, and thicknesses of the different films. X-ray diffraction confirmed the formation of the titanium nitride cubic phase. X-ray photoelectron spectroscopy (XPS) was used to study the silicon and oxygen levels in the films, and high resolution XPS was used to determine the surface oxide to nitride ratios as well as the silicon–nitrogen environment. The hardness of these films was then determined with nanoindentation. It was shown that grain size and film density could be controlled by the Si level and the ion bombardment to eliminate the oxygen level in the nitride coatings, which led to the harder films. It was suggested that due to the miscibility of Si, a ternary TiSiN solid solution was formed. Stronger (200) orientation of the TiN B1-NaCl crystals was associated with increased hardness of the coatings. In conclusion, this crystalline structure was preserved after incorporating Si.

36 MATERIALS SCIENCE↗

Complex high-temperature phase transitions in Li{sub 2}B{sub 12}H{sub 12} and Na{sub 2}B{sub 12}H{sub 12}

Differential scanning calorimetry measurements of Li{sub 2}B{sub 12}H{sub 12} and Na{sub 2}B{sub 12}H{sub 12} indicate hysteretic transformations to high-temperature phases at ≈615 K and 529 K, respectively, upon heating (1 K/min) from room temperature. X-ray and neutron powder diffraction measurements corroborate the phase-change behavior. For Li{sub 2}B{sub 12}H{sub 12}, the diffraction data are consistent with a previous study suggesting that the overall face-centered-cubic arrangement of icosahedral B{sub 12}H{sub 12}{sup 2−} anions is maintained upon transformation to the high-temperature polymorph, although the anions are now orientationally disordered and the Li{sup +} cations crystallographically disordered within an enlarged lattice. For Na{sub 2}B{sub 12}H{sub 12}, the diffraction data indicate the existence of three different high-temperature phases in addition to the known low-temperature monoclinic phase. The highest-temperature structure possesses Im3{sup -}m symmetry and exhibits a body-centered-cubic arrangement of orientationally disordered anions. The interstitial, disordered Na{sup +} cations appear to favor off-center positions within the distorted tetrahedral sites formed by the anions in this structure. An intermediate Pm3{sup -}n-symmetric phase at lower temperature is the result of a partial ordering of this higher-temperature structure. A third, minor, face-centered-cubic phase coexists with these high-temperature polymorphs. {sup 1}H NMR measurements of Li{sub 2}B{sub 12}H{sub 12} and Na{sub 2}B{sub 12}H{sub 12} reveal an approximately two-orders-of-magnitude increase in the reorientational jump rate of the anions in both cases upon transformation to their high-temperature structures. The enhanced anion mobilities were corroborated by neutron scattering fixed-window scans across the respective phase boundaries. The inherent cation disorder associated with these high-temperature polymorphs suggests their potential use as superionic conductors. - Graphical abstract: Na{sub 2}B{sub 12}H{sub 12} undergoes a phase transformation from an ordered monoclinic structure at low temperature to a partially disordered body-centered-cubic (bcc) structure at ≈529 K, and finally to a more-fully disordered bcc structure by ≈545 K. - Highlights: • Li{sub 2}B{sub 12}H{sub 12} undergoes a high-temperature hysteretic phase transformation at ≈615 K. • Na{sub 2}B{sub 12}H{sub 12} undergoes a high-temperature hysteretic phase transformation at ≈529 K. • Increased anion mobility is observed with NMR upon these H-T phase transformations. • Three high temperature phases are observed for Na{sub 2}B{sub 12}H{sub 12}, with increasing disorder.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗