Falabella, S. | Engineering Papers

DOE OSTI2020

Hollow-cathode chemical vapor deposition of thick, low-stress diamond-like carbon films

A radio-frequency (RF), hollow-cathode plasma source with confining magnetic field is described for the chemical vapor deposition of thick ( > 10 µm), amorphous diamond-like carbon ablator films for inertial confinement fusion applications. Plasma is characterized by optical emission spectroscopy, while properties of the resultant films are measured by a combination of profilometry, Rutherford backscattering spectrometry, elastic recoil detection analysis, X-ray diffraction, Raman spectroscopy, and atomic force microscopy. The dependence of the deposition rate, film density, elemental composition, self-bias and residual stress is reported as a function of RF power. Higher density films were found when using Ar plasma, than N 2 or H 2 plasma. The coatings produced are x-ray amorphous, exhibit low compressive stress ( ~ 100 MPa), high density ( < 1.7 g/cm 3 ), hydrogen content of ~ 30 at.%, and a low average roughness of 0.75 nm. Finally, applications of these films as tunable-density ablators for inertial confinement fusion experiments are discussed.

36 MATERIALS SCIENCE↗

DOE OSTI2019

Amorphous Carbon Coatings with Controlled Density and Composition

Inertial confinement fusion (ICF) experiments rely on the compression of a spherical capsule containing tritium and deuterium fuel as a way to achieve thermonuclear fusion. Rapid ablation of the capsule surface produces the reactive force that compresses the capsule. Carbon-based capsule materials currently used include low density glow discharge polymer (GDP) and polycrystalline diamond. An ideal capsule material would have the high density of diamond, with the amorphous nature of GDP, which would reduce asymmetries during compression caused by a random crystalline structure. An intermediate material, diamond-like carbon (DLC), has an amorphous structure, and densities between GDP and diamond, but has been difficult to produce with low stress and low impurity levels. The goal of this Feasibility Study was to investigate the practicality of using a magnetically enhanced, hollow-cathode, plasma source to produce thick (50-200 µm), low-stress, diamond-like carbon films for ICF ablator applications. The coatings produced during the course of this work have been shown to be amorphous, to have a higher density than traditional GDP ablators (1.6-1.7 g/cc), to have low stress (67-113 MPa), and can be deposited at the high thicknesses required for ICF capsule requirements. Atomic-force microscopy on a 45-micron-thick coating also measured the films to have grain sizes on the order of 20 nanometers, and a root-mean squared surface roughness of 0.5 nanometers.

36 MATERIALS SCIENCE↗