Thin-Entrance Window Sensors for Soft X-rays at LCLS-II
Free electron lasers, such as SLAC’s LCLS-II, will provide unique scientific imaging opportunities. In order to fully utilize these facilities, we need to develop detectors with shallow entrance windows that will enable detection of soft x-rays from 250eV-1.5KeV. Here, a new microwave annealing technology provides an efficient way to achieve shallow entrance windows in fully depleted high resistivity silicon sensors.
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