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Arnold, James O.

Publications and source records attributed to Arnold, James O..

At least 73 records · Page 4
All sourcesNASA NTRSDOE OSTI
NASA NTRS1999

Accurate In Bond Energies

InXn atomization energies are computed for n = 1-3 and X = H, Cl, and CH3. The geometries and frequencies are determined using density functional theory. The atomization energies are computed at the coupled cluster level of theory. The complete basis set limit is obtained by extrapolation. The scalar relativistic effect is computed using the Douglas-Kroll approach. While the heats of formation for InH, InCl and InCl3 are in good agreement with experiment, the current results show that the experimental value for In(CH3)3 must be wrong.

Bauschlicher, Charles W., Jr.↗
NASA NTRS1999

Subsurface Microsensors for Assisted Recertification of TPS (SmarTPS)

Commercialization of a competitive reusable launch vehicle (RLV) is a primary goal for both NASA and the U.S. aerospace industry. To expedite achievement of this goal, the Bantam-X Technology Program is funding development of innovative technologies to lower costs for access to space. Ground operations is one area where significant cost reduction is required. For the Shuttle fleet, ground operations account for over 80% of the life cycle costs, and TPS recertification accounts for 27% of the operation costs ($4.5M per flight). Bantam Task TPS-7, Subsurface Microsensors for Assisted Recertification of TPS (SmarTPS), is a joint effort between NASA centers and industry partners to develop rapid remote detection and scanning technology for inspection of TPS and detection of subsurface defects. This short paper will provide a general overview of the SmarTPS concept.

Pallix, Joan B.↗
NASA NTRS1999

Aerogel Composites: Strong and Waterproof

Aerogels are exotic materials having superior thermal and physical properties with great potential for both space and industrial uses. Although aerogels are excellent low-density insulators with unique acoustic and optical properties, their commercialization potential is currently limited by moisture absorption, fragility, and cost. This paper describes useful, easily scaled-up solutions to the first two of these three problems. The waterproofing and water-repellent method described here is a cheaper and simpler improvement over previous permanent methods.

White, Susan↗
NASA NTRS1998

Current Grid Generation Strategies and Future Requirements in Hypersonic Vehicle Design, Analysis and Testing

Recent advances in computational power enable computational fluid dynamic modeling of increasingly complex configurations. A review of grid generation methodologies implemented in support of the computational work performed for the X-38 and X-33 are presented. In strategizing topological constructs and blocking structures factors considered are the geometric configuration, optimal grid size, numerical algorithms, accuracy requirements, physics of the problem at hand, computational expense, and the available computer hardware. Also addressed are grid refinement strategies, the effects of wall spacing, and convergence. The significance of grid is demonstrated through a comparison of computational and experimental results of the aeroheating environment experienced by the X-38 vehicle. Special topics on grid generation strategies are also addressed to model control surface deflections, and material mapping.

Papadopoulos, Periklis↗
NASA NTRS1998

Infrared Spectra of Polycyclic Aromatic Hydrocarbons: Methyl Substitution and Loss of H

The B3LYP approach, in conjunction with the 4-31G basis set, is used to compute the harmonic frequencies of 1- and 2-methylnaphthalene, 1-, 2-, and 9-methylanthracene, and their cations. The IR spectra of the methyl substituted species are very similar to the parent spectra, except for the addition of the methyl C-H stretch at lower frequency than the aromatic C-H stretch. The loss of a single hydrogen from naphthalene, anthracene, and their cations is shown to have a very small effect on the IR spectra. Loss of a methyl hydrogen from 1- or 2-methylnaphthalene, or their cations, is shown to shift the side group C-H frequencies from below aromatic hydrogen stretching frequencies to above them. The loss of IT from 2-methylenenaphthalene shows only a small shift in the side group C-H stretching frequency.

Bauschlicher, Charles W.↗
NASA NTRS1998

Infrared Spectra of Polycyclic Aromatic Hydrocarbons: Nitrogen Substitution

The B3LYP/4-31G approach is used to compute the harmonic frequencies of substituted naphthalene, anthracene, and their cations. The substitutions include cyano (CN), aminio (NH2), imino (NH), and replacement of a CH group by a nitrogen atom. All unique sites are considered, namely 1 and 2 for naphthalene and 1, 2, and 9 for an'tracene, except for the imino, where only 2-iminonaphthalene is studied. The IR spectra of these substituted species are compared with those of the unsubstituted molecules. The addition of a CN group does not significantly affect the spectra except to add the CN stretching frequency. Replacing a CH group by N has only a small effect on the IR spectra. The addition of the NH2 group dramatically affects the neutral spectra, giving it much of the character of the cation spectra. However, the neutral 2-irrinonaphthalene spectra looks more like that of naphthalene than like the 2-aminonaphthalene spectra.

Bauschlicher, Charles W.↗
NASA NTRS1998

Accurate Heats of Formation for SFn, SFn+, and SFn- for n=1-6

Accurate heats of formation are computed for SFn, SFn+, and SFn-, for n=1-6. The geometries and vibrational frequencies are determined at the B3LY-P level of theory. The energetics are determined at the CCSD(T) level of theory. Extrapolation to the basis set limit is discussed. The temperature dependence of the heat of formation, heat capacity, and entropy are computed for the temperature range 300 to 4000 approx. K and fit to a polynomial.

Bauschlicher, Charles W., Jr.↗
NASA NTRS1998

Predictive Models for Semiconductor Device Design and Processing

The device feature size continues to be on a downward trend with a simultaneous upward trend in wafer size to 300 mm. Predictive models are needed more than ever before for this reason. At NASA Ames, a Device and Process Modeling effort has been initiated recently with a view to address these issues. Our activities cover sub-micron device physics, process and equipment modeling, computational chemistry and material science. This talk would outline these efforts and emphasize the interaction among various components. The device physics component is largely based on integrating quantum effects into device simulators. We have two parallel efforts, one based on a quantum mechanics approach and the second, a semiclassical hydrodynamics approach with quantum correction terms. Under the first approach, three different quantum simulators are being developed and compared: a nonequlibrium Green's function (NEGF) approach, Wigner function approach, and a density matrix approach. In this talk, results using various codes will be presented. Our process modeling work focuses primarily on epitaxy and etching using first-principles models coupling reactor level and wafer level features. For the latter, we are using a novel approach based on Level Set theory. Sample results from this effort will also be presented.

Meyyappan, Meyya↗
NASA NTRS1998

High-Density Plasma Reactors: Simulations for Design

The development of improved and more efficient plasma reactors is a costly process for the semiconductor industry. Until five years ago, the Industry made most of its advancements through a trial and error approach. More recently, the role of computational modeling in the design process has increased. Both conventional computational fluid dynamics (CFD) techniques like Navier-Stokes solvers as well as particle simulation methods are used to model plasma reactor flowfields. However, since high-density plasma reactors generally operate at low gas pressures on the order of 1 to 10 mTorr, a particle simulation may be necessary because of the failure of CFD techniques to model rarefaction effects. The direct simulation Monte Carlo method is the most widely accepted and employed particle simulation tool and has previously been used to investigate plasma reactor flowfields. A plasma DSMC code is currently under development at NASA Ames Research Center with its foundation as the object-oriented parallel Cornell DSMC code, MONACO. The present investigation is a follow up of a neutral flow investigation of the effects of process parameters as well as reactor design on etch rate and etch rate uniformity. The previous work concentrated on silicon etch of a chlorine flow in a configuration typical of electron cyclotron resonance (ECR) or helical resonator type reactors. The effects of the plasma on the dissociation chemistry were modeled by making assumptions about the electron temperature and number density. The electrons or ions themselves were not simulated.The present work extends these results by simulating the charged species.The electromagnetic fields are calculated such that power deposition is modeled self-consistently. Electron impact reactions are modeled along with mechanisms for charge exchange. An bipolar diffusion assumption is made whereby electrons remain tied to the ions. However, the velocities of tile electrons are allowed to be modified during collisions and are not confined to a Maxwellian distribution. The interaction between the neutral flow and plasma is examined, and results for etch rate uniformity from the previous research and the present plasma simulations are compared.

Hash, David B.↗
NASA NTRS1998

A Coupled Plasma Dynamics and Gas Flow Model for Semiconductor Processing

A continuum modeling approach by self-consistently coupling plasma dynamics and gas flow will be presented for the analysis of high density plasma reactors. Experimental data shows that gas flow distribution affects the etch rate uniformity even at low pressures (6-20 mTorr) and flow rates (20-70 sccm). This study will investigate the effects of gas flow and gas energy on bulk plasma densities and temperatures using a continuum model. The model solves multidimensional equations of mass balance for neutrals and ions, gas momentum, separate energy equations for electrons and neutrals and Maxwell's equations for power coupling. A test case of N2 plasma in a 300mm TCP etch reactor, for which hybrid model and Langmuir probe data are available, is chosen for this analysis. Our preliminary results show that modeling gas flow and energy improves the predictions of electron density and its spatial variation in the reactor when compared with the experimental data. The aim of this study is to identify the operating conditions for the TCP reactor when a self-consistent modeling of gas flow is important.

Bose, Deepak↗
NASA NTRS1998

Large-Scale Processing of Carbon Nanotubes

Scale-up difficulties and high energy costs are two of the more important factors that limit the availability of various types of nanotube carbon. While several approaches are known for producing nanotube carbon, the high-powered reactors typically produce nanotubes at rates measured in only grams per hour and operate at temperatures in excess of 1000 C. These scale-up and energy challenges must be overcome before nanotube carbon can become practical for high-consumption structural and mechanical applications. This presentation examines the issues associated with using various nanotube production methods at larger scales, and discusses research being performed at NASA Ames Research Center on carbon nanotube reactor technology.

Finn, John↗
NASA NTRS1998

A Transport Model for Non-Local Heating of Electrons in ICP Reactors

A new model has been developed for non-local heating of electrons in ICP reactors, based on a hydrodynamic approach. The model has been derived using the electron momentum conservation in azimuthal direction with electromagnetic and frictional forces respectively as driving force and damper of harmonic oscillatory motion of electrons. The resulting transport equations include the convection of azimuthal electron momentum in radial and axial directions, thereby accounting for the non-local effects. The azimuthal velocity of electrons and the resulting electrical current are coupled to the Maxwell's relations, thus forming a self-consistent model for non-local heating. This model is being implemented along with a set of Navier-Stokes equations for plasma dynamics and gas flow to simulate low-pressure (few mTorr's) ICP discharges. Characteristics of nitrogen plasma in a TCP 300mm etch reactor is being studied. The results will be compared against the available Langmuir probe measurements.

Chang, C. H.↗
NASA NTRS1998

Ion Energy Distributions and their Relative Abundance in Inductively Coupled Plasmas

Study of kinetics of ions and neutrals produced in high density inductively coupled plasma (ICP) discharges is of great importance for achieving a high degree of plasma assisted deposition and etching. In this paper, we present the ion energy distributions (IEDs) of various ions arriving at the grounded lower electrode. The ions were energy as well as mass analyzed by a combination of electrostatic analyzer-quadrupole mass spectrometer for pure Ar and CF4/Ar mixtures. The measurements have been made at gas pressures ranging from 30 to 100 mTorr. In addition, the IEDs were measured when the wafer-supporting electrode was also rf-powered and the effect of the self-bias was observed in the energy distributions of ions. The shapes of the IEDs are discussed an related to the sheath properties and measured electrical waveforms, as a function of pressure and applied power. Relative ion intensities were obtained by integration of each ion kinetic energy distribution function over its energy range.

Kim, J. S.↗
NASA NTRS1998

Aerothermal Effects of Cavities and Protuberances for High-Speed Sample Return Capsules

Extraterrestrial sample return is a growing component of solar system exploration. Currently, four missions, Stardust, 1 Muses-C, 2 Genesis, and Mars Sample Return, are under development that employ sample return as a prime component of the mission architecture. Respectively, these missions will return samples from the tail of a comet, an asteroid, the solar wind, and, Mars. An important component of these missions and the focus of this paper is the design of the sample return capsule (SRC). The purpose of the SRC is to safely return to Earth any gathered samples for terrestrial analysis. The two major design constraints for any SRC are as follows: 1) it must be able to survive a high-speed Earth entry (11 km/s to as a high as 15 km/s), 2) the mass of the SRC must be as small as possible. Because the SRC mass is carried from Earth to the sample sight and back, the SRC mass is a strong driver in the mission mass budget. Further, for the Mars Sample Return Capsule, planetary protection is another constraint. For this capsule, the probability of planetary contamination at Earth due to an SRC failure at entry must be minimal. For an SRC, a possible failure mechanism is severe local heating as a result of cavities and or protuberances in the SRC forebody heatshield. For example, the Apollo Command Module had a number of cavities and protuberances as part of the baseline designs Wind-tunnel tests of models containing small cavities and protuberances showed severe local heating augmentations in the vicinity of these surface discontinuities.4-5 As another example, the Genesis SRC forebody heat-shield contains penetrations (cavities) to mount the vehicle to the carrier bus. It is expected that these penetrations will also experience a severe local heating environment. A concern is that the large thermal gradients may produce sufficient thermal stress to cause local mechanical failure of the heatshield. Penetrations to the forebody heat-shield can also result from damage at vehicle integration, during launch, or during transportation of the sample return capsule from earth to the sample site and back. For example, the Starting SRC was damaged near the shoulder during the heatshield integration process producing a local surface discontinuity. Also, the Starting SRC traverses through the tail of a comet and is in space for 7 years. Thus, damage to the heatshield as a result of micrometeroid impact is a concern. Finally, it is difficult to characterize the effects of these potential heatshield singularities with ground-test facilities. Either detailed simulation or a dedicated flight test is required.

Olynick, David↗
NASA NTRS1998

A Survey of Electron Impact Cross-Sections for Halogens and Halogen Compounds of Interest to Plasma Processing

Published electron impact cross section data on halogens Cl2, F2, and halogen containing compounds such as Cx Fy, HCl, Cx Cly Fz are reviewed and critically evaluated based on the information provided by various researchers. The present work reports data on electron impact excitation, ionization, dissociation, electron attachment, electron detachment, and photo detachment. Elastic scattering cross sections and data on bulk properties such as diffusion coefficients in various background gases are also evaluated. Since some of the cross sectional data is derived from indirect measurements such as drift velocity, care has been taken to reconcile the differences among the reported data with due attention to the measurement technique. In conclusion, the processes with no or very limited amount of data and questionable set of data are identified and recommendation for further research direction is made.

Sharma, S. P.↗
NASA NTRS1998

Simulation of Etching Profiles Using Level Sets

Using plasma discharges to etch trenches and via holes in substrates is an important process in semiconductor manufacturing. Ion enhanced etching involves both neutral fluxes, which are isotropic, and ion fluxes, which are anisotropic. The angular distributions for the ions determines the degree of vertical etch, while the amount of the neutral fluxes determines the etch rate. We have developed a 2D profile evolution simulation which uses level set methods to model the plasma-substrate interface. Using level sets instead of traditional string models avoids the use of complicated delooping algorithms. The simulation calculates the etch rate based on the fluxes and distribution functions of both ions and neutrals. We will present etching profiles of Si substrates in low pressure (10s mTorr) Ar/Cl2 discharges for a variety of incident ion angular distributions. Both ion and neutral re-emission fluxes are included in the calculation of the etch rate, and their contributions to the total etch profile will be demonstrated. In addition, we will show RIE lag effects as a function of different trench aspect ratios. (For sample profiles, please see http://www.ipt.arc.nasa.gov/hwangfig1.html)

Hwang, Helen↗
NASA NTRS1998

Aerogel: Tile Composites Toughen a Brittle Superinsulation

Pure aerogels, though familiar in the laboratory for decades as exotic lightweight insulators with unusual physical properties, have had limited industrial applications due to their low strength and high brittleness. Composites formed of aerogels and the ceramic fiber matrices like those used as space shuttle tiles bypass the fragility of pure aerogels and can enhance the performance of space shuttle tiles in their harsh operating environment. Using a layer of aerogel embedded in a tile may open up a wide range of applications where thermal insulation, gas convection control and mechanical strength matter.

White, Susan↗