Orifice gross leak tester Patent
Test chambers with orifice and helium mass spectrometer for detecting leak rate of encapsulated semiconductor devices
Altshuler, T. L.↗
Engineering topics
Publications and source records attributed to Altshuler, T. L..
Test chambers with orifice and helium mass spectrometer for detecting leak rate of encapsulated semiconductor devices
Simple, reliable, inexpensive method for gross-leak testing has been devised, based upon the conventional fine-leak technique. The sensitivity ranges from the detection of very large leaks down to leaks of 10 to the minus seven cc helium per sec.
Probability distribution functions for carbon dioxide, and line spectra model